气溶胶喷射打印技术简介
ABOUT AEROSOL JET PRINTING
气溶胶喷射打印技术是一种新兴的非接触式先进制造技术,其通过控制并约束微液滴的传输与沉积,可实现组分、微结构可控的微尺度打印过程。当前,气溶胶喷射打印技术已在电子、光电、光学、新能源、医疗卫生、航空航天、微纳制造等领域器件和系统从概念到原型的快速制造过程中显示出巨大应用前景,相关工作发表在Nature、Nature Materials等高水平期刊上*。
* Nature 2023, 617, 292–298; Nature Materials 2022, 21, 811-818; Nature Materials  2024, 10.1038/s41563-024-01831-1, Nature Electronics 2020, 3, 622–629; Advanced Materials 2020, 3, 2006647; Advanced Materials 2021, 33, 2006792; Additive Manufacturing 2023, 63, 103412; Science Advances 9, 9, eadi5104; Advanced Materials 2020, 32, 2004277;  Additive Manufacturing 2018, 23, 70-78; Advanced Materials 2014, 26, 7032-7037; Advanced Energy Materials 2017, 7, 1701151;  Additive Manufacturing 2020, 33, 101096.
气溶胶喷射打印过程
01
雾化过程溶液或悬浮液经超声雾化或气动雾化形成气溶胶液滴
筛分过程
气溶胶液滴被过滤或虚拟撞击器筛分去除过大或过小液滴并经载气输送至打印头
02
约束过程
气溶胶液滴在打印头经鞘气约束聚焦,形成微米级幅宽射流,调节聚焦比可以原位调控射流幅宽
03
沉积过程
气溶胶液滴在基底表面限域沉积,实现微尺度3D打印过程,通过控制沉积稳定可以调控溶质迁移组装过程
04
气溶胶喷射打印技术优势
适用材料广
——
可雾化的材料体系均适用气溶胶喷射打印技术,适用粘度可达1000cP。在应用过程中,可以将待打印材料直接配制成溶液或悬浮液。
在打印过程中,通过调节聚焦比,构建液滴传输微通道,有效降低飞溅发生的同时,原位调控射流幅宽,实现数微米至数百微米高质量打印及自由调节。

打印精度高
——
墨水容易配
——
墨水配制简单易行,可以使用简单溶剂(如水、乙醇等)对微纳米材料分散,或直接配制溶液,粘度可至1000cP。配制过程中无需添加其他分散剂或助剂。本技术可以大大缩短传统过程中的墨水配制摸索过程,降低因添加剂对材料性能的影响。
结构多尺度
——
微反应技术在精细化工、纳米材料以及基于微反应技术的新过程等方面具有重大应用前景。在气溶胶喷射打印过程中,微米级的液滴可以作为微反应器,通过控制传输及沉积中的温度场,实现对材料结构的多尺度原位控制,极大丰富增材制造技术的应用内涵。
适用材料表

材料形态

溶液(悬浮液)、量子点、纳米颗粒、纳米棒(线)   、二维材料(纳米片)、小分子、大分子、聚合物等

金属材料

金、银、铜、铂、镍、钯、铝、合金等

非金属导体

碳管、石墨烯、MXene、PEDOT:PSS、ITO等

化合物

氧化钛、氧化锌、氧化锡、氧化锆、氧化铟、氧化   镍、氧化钨、氧化硅、铝热剂、钛酸钡、钙钛矿、   磷酸铁锂、稀土氧化物、四氧二铁酸钴、陶瓷等

有机和高分子

   糖、聚苯胺、聚酰亚胺、聚乙烯比咯烷酮、聚二甲基   硅氧烷、环氧树脂、光刻胶、聚偏二氟乙烯、聚氨酯、生物材料 、蛋白质、酶、特氟龙等


Comparison between different droplet-based printing techniques**
** Advanced Materials 2021, 33, 2006792.


    Characteristic

   Inkjet

   Aerosol Jet

   E-jet

    Deposition mechanism

   Electrostatic

   Aerodynamic

   Electrohydrodynamic

    Viscosity (cP)

   1-20

   0.7-2500

   <300

    Working distance (mm)

   1

   1-5

   <1

   Print speed (mm s-1)

     Up to 2000

     Up to 200

    Up to 100

   Minimus line width (um)

     30

     10

    <0.1

   Geometry of substrate

     Planar

     Planar & non-planar

    Planar

   Nozzle diameter (um)

     10-50

     100-300

    0.3-30

   Particle size of ink (nm)

   <100

   <700

    Variable based on nozzle diamter


技术优势

技术优势

TECHNICAL ADVANTAGES

集成电路、芯片
电子信息
光电与光学
医疗卫生
新能源新材料
其他技术领域
集成电路、芯片
2.5 & 3D Chip-to-board interconnect; Through-via interconnection with good coverage for trapezium or even reverse trapezium via; Through‑via interconnection for MEMS wafer‑level packaging; 3D integration of MEMS devices with Via Last approach for the formation of MEMS TSVs and Cu based thermo-compression bonding; CMOS chip; Integrated SiP; Precision dispensed die fillet; Fillets for electrical connections between different leveled surface; Multilayer circuitry; Microwave circuit; Drive circuit; Printed-sensor-on-chip device; Interdigitated electrode; Microwave & millimeter packaging; MEMS wafer‑level packaging; Semi-embedded power assembly; Electrical contacts in SOI MEMS; Liquid metal contact.
电子信息

○Electronic Components: Microelectrode & microdevice; Ransistor; Capacitive strain gauge; Organic Electrochemical Transistors(OECTs); Thin-film transistors(TFTs); Selectively deposition of SWCNTs in TFT channels; Field effect transistor; Electrolyte-gated transistor; CNT transistor; Organic electrochemical transistor; PEDOT:PSS transistor; Thermistor (NiO, graphene channel); Dielectric line of touch panel display jumper; Flat inductor; Broadband inductor; Solid-core solenoid inductors; Ring oscillator; Microwave microstrip ring resonator; Electrochemical TEM microdevice; RGO circuit; Memristor; Notch filter; Bandpass filter; Actuator; RFID; Diode; Mie Resonator; Inverter; Quasi-Optical Terahertz components; CMOS inverters.

○ Flexible Electronics: Strain sensor; Humidity sensor; pH sensor; Flexible strain sensor; Flexible CNT transistors for pressure sensing; Flexible 1D−2D TFT; All-printed CNT TFT; Flexible SWCNT FE-TFTs; Flexible temperature sensor; Flexible CNT pH sensor; Paper photodetector; Freestanding structures for stretchable electronics and sensing application; Flexible CNT CMOS device; Smart devices on cellulose-based materials; Flexible and conductive graphene/Ag patterns.

○ Communication Antenna: Conformal antenna; Silver microstrip lines with ultralow RF signal loss; Alien squiggle antenna; Optical waveguides for short range communication; Coplanar waveguide; Band-stop filter; Magnetic nanocomposites for microwave circuit; Al/Cuo nanothermites for energetic antenna; Surface acoustic wave sensor; 3D metal-dielectric structures at sub-mm length scale; Sub-mm wavelength 3-D antenna; Planar inverted-F antenna (PIFA).   

○ Sensors: Strain sensor; Humidity sensor; pH sensor; IoT sensor; Piezoelectric sensor; Capacitive touch sensor; Resistive temperature sensor; Cu−CuNi temperature sensor; Fluorescence quenching sensor; Image sensor; Bimodal sensor; Piezoresistive sensor; Microfluidic force sensor; Chemisensor; Immunosensor; Ammonia sensor; NO2 sensor; Electrochemical sensor; Electrochemical immunosensor; Electrochemical histamine sensor; Cells differentiation sensor; COVID-19 sensor; Prothrombin time sensor; Electrochemical amperometric ethylene sensor.

光电与光学

○ OLED: OLED with PEDOT : PSS grids; Polymer lines for organic LED; Sorting of semiconducting CNT and printed flexible driving circuit; Hybrid electronic circuits combining printed technology and surface-mount technology; Patterning of top emitting OLED; Thin-film encapsulation of organic layer.

○ LED: The die-attach material and the electrical interconnect; LED with printed die-attach, electrical interconnects and a phosphor layer; Phosphor layer precision deposition; Synthesis of highly luminescent phosphor spherical nanoparticles.

○ Optoelectronic Device: Optical waveguide; Top grids for organic optoelectronic device; Image sensor based on organic photodiodes; Epoxy resin for optical waveguide; Polymer optical waveguide; Epoxy resin on polycarbonate; Precise thickness deposition of PEDOT:PSS for modifying work function; Hierarchical pillar array electrodes for high-performance semi-artificial photosynthesis; Flexible semitransparent organic photodiodes (OPDs) in an inverted architecture without the use of ITO; Photoconductive ZnO films printed on flexible substrates; AJP process for the deposition of dielectrics and conductors for fully additive substrate integrated waveguide(SIW) with continuous sidewalls; Imbedded Graphene/ZnO bulk heterojunctions for ultraviolet photodetection; Printed black phosphorus ink for planar and conformal optoelectronics; MoS2/p-Si heterojunctions.

○  Optical Film: Rare earth luminescent thin film; Defect-tailored polymer-sorted SWNTs thin film; Graphene-embedded ZnO film; IGZO and ZnO film; Nanowire networks of ZnOEP.

○ Optical Devices: ZnO ultraviolet photodetector; Zinc octaethylporphyrin nanowire for flexible photodetectors; PEDPT:PSS photodetector; UV sensors of graphene quantum dot; Graphene/ZnO bulk heterojunction films for ultraviolet photodetection; Optical transmitter assembly of a microring modulator and a high-speed CMOS driver; Flexible semitransparent organic photodiodes (OPDs) in an inverted architecture without the use of ITO; Photoconductive ZnO films on flexible substrates; Printing polymer optical waveguides on conditioned transparent flexible foils.

○ Conductive Film: Transparent and freestanding SWCNT film; Transparent electrodeof silver nanowire and nanosheet; Conductive CNT/polyimide film; Flexible substrates with embedded silver line; High-conductivity crack-free 3D electrical interconnect directly printed on soft PDMS substrate; Highly conductive networks of silver nanosheets, SWNT membrane; Grid-type transparent electrode.

医疗卫生

○ Brain-machine Interface: Customisable neuronal guidance; PEDOT:PSS pattern; High-aspect ratio micro-needle electrode array for human cerebral organoids; High-density microelectrode array platform with operation in penetrating into and recording from biological tissue; Multi‐dimensional OECT force sensor with high sensitivity and large measuring range

○ Electronic Skin: CNT complementary electronics and integrated sensor system; Hybrid printing of wearable piezoelectric sensor; Wearable bandage-based strain sensor for home healthcare; Soft, wireless periocular wearable electronics; Flexible tattoo electrodes for epidermal and in vivo electrophysiological recording; Skin-wearable sensor for monitoring of volumetric muscle loss; Potentiometric pH sensor for sweat measurements in smart patches.

○ Stent: Implantable vascular electronics with soft sensors for multiplex sensing of hemodynamics; Precise deposition of drugs in the grooves of the stent pillars to reduce shear damage during delivery.

○ Medical Devices: Multimaterial bathless stereolithography of hearing aid component; Highly efficient, homogeneous, and reproducible SERS structures.

○ Medical Sensors: Conformable and robust microfluidic force sensors to enable precision joint replacement surgery; Soft strain sensor for monitoring of structural health and human physiology; Graphene electrochemical immunosensors for rapid and label-free detection of SARS-CoV-2 in saliva; Structurally integrated 3D conductive networks-based flexible strain sensors for healthcare monitoring; Fine-featured triboelectric sensors for motion sensing; Graphene immunosensor for label-free cytokine monitoring in serum; Triboelectric sensor.

○ Flexible & Wearable: Soft, wireless periocular wearable electronics for mobile eye therapies; Wearable piezoelectric sensor; Wearable bandage-based strain sensor; Flexible strain sensor; Stretchable optoelectronic synaptic transistor array; Dielectric elastomer actuator; Freestanding conductive wires as stretchable interconnects/electrodes and as strain-sensors; Multilayer capacitive sensor by copatterning.

○ Cell & Protein: Flexible CNT pH sensor for live cell application; 3D electrochemical sensor for protein detection; Monitoring Caco-2 to enterocyte-like cells differentiation on printed sensor; Prothrombin time sensor for point-of-care testing; Biosensor; Ordered cell array; Printing fluorescence-marked protein and printing enzyme without affecting their biological activity; Aqueous gelatin; Printing biological reagents to fabricate in vitro diagnostic (IVD) assays.  

○ Microfluidics: Conformable microfluidic force sensors; Rapid prototyping of microfluidic devices with versatile geometries and precise channel functionalization; Optofluidic chips for SERS; Support-material-free microfluidics on an electrochemical sensors platform; Produce bespoke molds for microfluidic devices; Selective wettability surface via AJP; Surface acoustic wave microfluidic devices.

新能源新材料

○ Photovoltaics: Grid for ITO-free inverted organic solar cell; Cu2ZnSnS4(CZTS) thin film; Fine line printed silicon solar cell; Collecting electrode of photovoltaic device; Perovskite film; Low-cost metallization of silicon solar cell; Thin-film perovskite growth; Active layers in polymer solar cell(PCBTDPP:PC70BM, P3HT: PC60BM); Aluminum metallization of Si photovoltaic device; Laser chemical processing(LCP) and AJP to produce a high-efficiency front side for silicon solar cell.

○ New Energy Devices: Graphene & MXene microsupercapacitor(MSCs); Li-Ion  battery cathodes(LFP cathode, hierarchically-porous); Silicon electrode; LiNi0.8Mn0.1Co0.1O2; YSZ electrolyte; Graphene electrode; Microlattice electrode; SOFC electrolyte and cathode layers; Top grids for organic optoelectronic device; LTO/CNT-based LIB; CoFe2O4-CNT 3D MSC devices; Lithium sulfide-carbon composite cathode; Mesoporous carbon sphere for potassium ion battery; Li-ion conducting solid polymer composite electrolytes; Silicon anode materials; Ultra-thin gel electrolyte based on polyvinyl alcohol-sodium chloride-glycerol; Carbon-based cathodes for metal-air batteries; Fibrous supercapacitor/LIB devices; Stretchable supercapacitors.

○ Micro/nanostructures: Curling and alignment of MXene; Crumpled MXene nanosphere; 3D Networks of Ag nanorod–nanoparticle hybrids; Hybrid MXene/C nanospheres; Pomegranate-like Y2O3:Eu; CTZS thin film; CoFe2O4 nanoparticles; Porous noble metals and alloys; Cu@Ag core-shell structures; TiO2–x/C composite microspheres.

○ Gradient Materials: Graded SOFC anode interlayer; Copatterning of PDMS and graphene platelet; Compositionally graded organic–inorganic nanocomposites; High-throughput printing materials with compositional gradients at microscale spatial resolution; Multimaterial bathless tereolithography; PI/CNT nanocomposite with tailorable and controllable intra-part varying CNT loading.

○ Metamaterials: Terahertz metamaterial with precise deposition of metallic inks with line widths down to 10µm and the use of digitally generated tool paths; Metamaterial-inspired terahertz filter.

○ Thermo- & Piezoelectric: PZT thick films; Flexible thermoelectric film; Wearable piezoelectric sensor; Flexible thermoelectrics with ultrahigh power factor; Flexible bismuth telluride and antimony telluride thin films; Sb2Te3 nanoflakes/MWCNTs nanocomposites.

其他技术领域

○ Aerospace: Space survivability for printed electronics applications; Embedded polymer based piezoresistive sensors; Al/Cuo nanothermite; CNT transistors for pressure sensing in automobile tire; Strain gauge on aluminum substrate; Radiation-hardened field-effect transistor; Dielectric ceramic layers.

○ Radiation Detection: Pt contact on 4H-SiC for radiation detection; Ni nanoparticle thin film on nickel substrate; Graphene composite film-based UV sensor.

○ Food Safety: Graphene electrochemical histamine sensors for food safety monitoring; Biodegradable materials; Metal nanocluster-modified CNT electrode  for electrochemical sensing detection of carbendazim.

○ Anti-counterfeiting: Security printing of covert quick response code using upconverting nanoparticle inks; RGB additive-color printing system by independent deposition of three primary-color upconverting inks.

○ Gases & Chemical Detection: Fluorescence quenching sensor arrays for the identification and auantification of explosive vapors; Chemisensor for the detection of nerve gas; Sensor for detecting chemical species; Nanoparticle based sensors on paper for detecting chemical species; Hydrogen sensor with platinum-decorated SWCNTs; Electrochemical NO2 sensor based on ionic liquid; Platinum microheaters for the application in gas sensors; WS2 nanosheets-based ammonia gas sensor; Ionic liquid-based flexible hydrogen sensor; Polyaniline-based ammonia sensor.

○ Micro/nano Fabrication: Sugar microlattice; PEDOT:PSS and CNT needle arrays; Ag microcone/needle/pillar array; Ag microlattice; Hierarchical ITO pillar array electrodes; Collagen pillar array; Ag leaf- or flflake-like structures; Collagen lattice unit; Complex 3D microengineered materials by pointwise spatial printing; Arrays of metal nanostructures with fexible geometry and feature sizes via charged aerosol jets.   

○ Structural Health Monitoring: Buckypaper multifunctional sensors for composite structural health monitoring; Noninvasive material thickness detection by AJP of sensors; Capacitive strain gauge for soft structural materials; Strain gauge printed onto a layer of H-cement; Strain gauge on low-melting point plastic surface.

○ Microheater: Au double meander micro-hotplate; Platinum microheater on LTTC ceramic substrate; Resistance temperature detector‐micro hotplate with temperature coefficient of resistance stabilized.

○ Fire Detection: Smell detecting electronic nose (e-Nose) of SnO2 nanowires.

○ Membrane Reactor: Palladium-silver alloys.

应用场景
气溶胶喷射打印设备
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